ELECTROSTATIC ATTRACTING METHOD, EXPOSURE METHOD, ELECTROSTATIC ATTRACTING APPARATUS, ALIGNER, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic attracting method, an exposure method, an electrostatic attracting apparatus, an aligner, and a method for manufacturing device detecting information about foreign matters between an attracting object and an electrostatic chuck.;SOLUTION: The electrostatic attracting method for electrostatic attraction of an attracting object to a base board includes a detecting step 104 for detecting attracting condition of the attracting object to the base board and a determining step 105 for determining information about foreign matters between the attracting object and the base board based on the result of detection in the detecting step 104. Moreover, the electrostatic attracting apparatus for electrostatic attraction of the attracting object to the base board includes a detecting means for detecting attracting condition of the attracting object to the base board and a determining means for determining information about foreign matters between the attracting object and the base board, based on the result of detection by the detecting means.;COPYRIGHT: (C)2011,JPO&INPIT