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FAILURE CAUSE ANALYZER, FAILURE CAUSE ANALYSIS METHOD, FAILURE CAUSE ANALYSIS PROGRAM, AND PROGRAM RECORDING MEDIUM

机译:故障原因分析器,故障原因分析方法,故障原因分析程序和程序记录介质

摘要

PPROBLEM TO BE SOLVED: To specify a failure cause even in the case of occurrence of failure in prediction characteristics of JIT modeling. PSOLUTION: An abnormal past data extraction portion 5 extracts past data of which the distance from operation data of an abnormal product is equal to or shorter than a set distance, out of past data in a storage portion 4, as abnormal past data. A normal past data extraction portion 6 extracts a pair of operation data processed within a prescribed time range from the time of processing of the abnormal past data in a processor 9, and characteristic data determined as a non-defective product as normal past data. A model generation portion 7 generates a model for cause analysis on the basis of the normal past data. An analysis portion 8 specifies the failure cause of a product determined to have abnormal characteristics, by contribution rates per variable based on the model for cause analysis. Thus operation data as the cause of failure can be specified from among operation data on the basis of the model for cause analysis, which is capable of satisfactorily explaining normal past data, even in the case of characteristic prediction with the JIT modeling. PCOPYRIGHT: (C)2011,JPO&INPIT
机译:

要解决的问题:即使在JIT建模的预测特征发生故障的情况下,也要指定故障原因。

解决方案:异常过去数据提取部分5从存储部分4中的过去数据中提取与异常产品的操作数据的距离等于或小于设定距离的过去数据作为异常过去数据。 。正常过去数据提取部分6从在处理器9中处理异常过去数据的时间起提取在规定时间范围内处理的一对操作数据,以及被确定为无缺陷产品的特征数据作为正常过去数据。模型生成部7基于通常的过去数据生成用于原因分析的模型。分析部分8基于用于原因分析的模型,通过每个变量的贡献率来确定被确定为具有异常特性的产品的失败原因。因此,即使在利用JIT建模进行特征预测的情况下,也能够基于原因分析模型从操作数据中指定作为失败原因的操作数据,该操作数据能够令人满意地解释正常的过去数据。

版权:(C)2011,日本特许厅&INPIT

著录项

  • 公开/公告号JP2010283274A

    专利类型

  • 公开/公告日2010-12-16

    原文格式PDF

  • 申请/专利权人 SHARP CORP;

    申请/专利号JP20090137283

  • 发明设计人 YAMADA EIJI;

    申请日2009-06-08

  • 分类号H01L21/02;G05B19/418;G06Q50;H01L21/66;

  • 国家 JP

  • 入库时间 2022-08-21 18:21:09

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