Creation manner of the diagram which is used for the wavelength choice of light for grinding terminus detection, wavelength choice manner, grinding terminus method of detection of light and creation manner of the diagram which is used for the grinding terminus

摘要

PROBLEM TO BE SOLVED: To provide a method for efficiently selecting the most suitable wavelength of light for detecting optical polishing endpoint.;SOLUTION: A method of making a diagram for use in selecting the wavelength of light in optical polishing end point detection is provided. The method includes the steps of: polishing a surface of a substrate with a film by a polishing pad; applying light to the surface of the substrate and receiving reflected light from the substrate during polishing of the substrate; calculating the relative reflectance of the reflected light for each wavelength; obtaining the wavelength of the reflected light indicating a local maximum point and a local minimum point of the relative reflectance varying with a polishing time; identifying a point of time when the wavelength indicating the local maximum point and the local minimum point is obtained; and plotting a coordinate, predetermined by the obtained wavelength and the corresponding point of time, onto a coordinate system with coordinate axes indicating the wavelength of light and polishing time.;COPYRIGHT: (C)2010,JPO&INPIT