Origin detection method of the microscope for electric stage

摘要

PROBLEM TO BE SOLVED: To provide an electromotive stage for microscope without no projection on an upper face of the stage, with excellent operability, less lost motion and high reproducibility.;SOLUTION: The electromotive stage for microscope includes: a stationary member 10 to be fixed to the microscope; a movable member 11 that holds a sample 2 and can move in two directions at a right angle to an optical axis of the microscope; a stepping motor 20 for moving the movable member 11; and a power transmitter for transmitting a rotation of the stepping motor 20 to the movable member 11. The power transmitter includes a reducer 17 having a spur gear which reduces a speed of the rotation of the stepping motor 20, and an urging unit 40 which applies a rotation force to the spur gear in one direction in a movement range of the movable member 11.;COPYRIGHT: (C)2003,JPO