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摘要

PROBLEM TO BE SOLVED: To provide an abnormality processing unit capable of shortening a period of time when a charged particle beam apparatus cannot be used by taking into account the maldistribution of abnormalities and faults occurring in each apparatus.;SOLUTION: The abnormality processing unit 2, which displays a processing corresponding to abnormalities and faults detected for a charged particle beam apparatus 1 which uses charged particle beams in vacuum, comprises a ranking database 6 which includes identifiers each of which is corresponding to an abnormality or a fault, and stores an order data capable of determining the order of higher frequency of occurrence of an abnormality and a fault in next time and also stores a processing corresponding to an abnormality or a fau an abnormal item extraction part 11 which, when a plurality of abnormalities and/or faults occur at the same time, extracts the identifiers of them; an order data extraction part 12 which extracts occurring abnormalities and/or faults corresponding to extracted identifiers; a processing extraction part 17 which extracts a processing corresponding to an occurred abnormality and/or fault in accordance to an order determined based on an extracted order data; and a display part 8 which displays an extracted processing.;COPYRIGHT: (C)2008,JPO&INPIT