The solar battery, forming the antireflection film of the nitriding silicone film on

摘要

PROBLEM TO BE SOLVED: To provide a solar cell including a silicon nitride film having high H₂ passivation effect as an antireflection film.;SOLUTION: The silicon nitride film is used as an antireflection film of the solar cell composed of a silicon substrate. An antireflection film forming apparatus 301 forms the silicon nitride film. The silicon substrate carried to a chamber 302 is carried to a surface wave excitation plasma CVD apparatus 303 with the aid of a carrying apparatus stored in a carrying chamber 305. The surface wave excitation plasma CVD apparatus 303 forms the silicon nitride film. The silicon nitride film is carried to a heating chamber 304 by the carrying apparatus stored in the carrying chamber 305. The silicon nitride film undergoes a heat treatment in a hydrogen atmosphere by a lamp heater in the heating chamber 304.;COPYRIGHT: (C)2006,JPO&NCIPI