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Potential measurement apparatus according to the physical phenomena or chemical phenomena

机译:根据物理现象或化学现象的电位测量装置

摘要

PPROBLEM TO BE SOLVED: To provide an instrument for measuring a precise potential related to a physical or chemical phenomenon constituted so as to simply correct the irregularity or changes of the output characteristics of a device with time and to enhance properties for various applications. PSOLUTION: The instrument for measuring a potential has at least one detection system 21 having a charge feed part, a sensing part and floating diffusion and the reference potential setting part 26 provided to a sample introducing part, with which the sensing part comes into contact, to prescribe the measuring potential of the detection system and also has a control adjusting part 22 for scanning the potential of the reference potential setting part 26 to acquire the output characteristics of the detection system 21 and controlling the quantity of the charge supplied to the sensing part to adjust the rising REF voltage of the output characteristics to automatically correct the output characteristics. PCOPYRIGHT: (C)2007,JPO&INPIT
机译:

要解决的问题:提供一种用于测量与构成的物理或化学现象有关的精确电势的仪器,以便简单地校正设备的输出特性随时间的不规则性或变化,并增强各种应用的性能。

解决方案:用于测量电位的仪器具有至少一个检测系统21,该检测系统具有电荷馈送部,感测部和浮动扩散部以及设置在样品引入部上的基准电位设定部26,该感测部具有接触以规定检测系统的测量电势,并且还具有控制调整部分22,用于扫描参考电势设置部分26的电势以获取检测系统21的输出特性并控制提供给检测系统21的电荷量感测部分调节上升REF电压的输出特性以自动校正输出特性。

版权:(C)2007,日本特许厅&INPIT

著录项

  • 公开/公告号JP4641444B2

    专利类型

  • 公开/公告日2011-03-02

    原文格式PDF

  • 申请/专利权人 株式会社堀場製作所;

    申请/专利号JP20050101855

  • 发明设计人 三村 享;

    申请日2005-03-31

  • 分类号G01N27/00;G01D5/12;H01L27/14;G01N27/416;

  • 国家 JP

  • 入库时间 2022-08-21 18:18:04

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