As film production manner and the film production

摘要

Topic Without contact evaporating the raw materials, unit or it offers method and the device which accumulate pluralistic layer and stacked layer.Solutions This invention, the process chamber (2) being the device which in inside at least accumulates 1 layer at least on one baseplate, consists of the plural components, liquefied or the raw materials which are melted in the liquid temperature the evaporation chamber which is controlled shoots (3) to (4) discontinuously layer and the injector unit which possess insulated, passivation characteristic or conductivity making use of (5) and the component evaporates by being packed, regards the device which is supplied to the process chamber these steam the carrier gas (7) by. It passes each injector unit (5) time profile of the flow which is decided, ejection pressure, the fact that flow parameter such as ejection frequency, and duty ratio, and relationship of the phase for on/the off of other injector unit of on/off individually is set or is modified, or is the basis. Selective figure Figure 1