首页>
外国专利>
Method of manufacturing a trench MOSFET having trench contacts integrated with trench Schottky rectifiers having planar contacts
Method of manufacturing a trench MOSFET having trench contacts integrated with trench Schottky rectifiers having planar contacts
展开▼
机译:制造具有与具有平面触点的沟槽肖特基整流器集成在一起的沟槽触点的沟槽MOSFET的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
An integrated configuration comprising trench MOSFET having trench contacts and trench Schottky rectifier having planar contacts is disclosed. The trench contacts for trench MOSFET provide a lower specific on-resistance. Besides, for trench gate connection, planar gate contact is employed in the present invention to avoid shortage issue between gate and drain in shallow trench gate. Besides, W plugs filled into both trench contacts and planar contacts enhance the metal step coverage capability.
展开▼