Droplet applying apparatus, method for measuring gap of droplet ejecting section and method for adjusting gap of droplet ejecting section

摘要

A droplet applying apparatus includes a base 11 having a mounting surface 11a on which a substrate 10 is to be mounted, beam members 41, 42 which are fitted to the base 11 so as to be movable relative to the base 11 in the arrow A direction, a plurality of droplet ejecting sections 6 which are fitted to the beam members 41, 42 so as to be movable in the arrow B direction and which eject droplets to the substrate 10 mounted on the mounting surface 11a, reference members each of which is provided at a site of the beam members 41, 42 proximate to the ejecting surface of each droplet ejecting section 6 and whose distance to the mounting surface 11a is known, a distance measuring section 14 for measuring a distance to the ejecting surface of each droplet ejecting section 6 and a distance to each reference member, and a calculation section 15 for, based on a distance between the ejecting surface of the one droplet ejecting section 6 and the distance measuring section 14 as well as a distance between the one reference member and the distance measuring section 14, both measured by the distance measuring section 14, plus a known distance between the one reference member and the mounting surface 11a, calculating a gap between the ejecting surface of the one droplet ejecting section 6 and the mounting surface 11a.