Nano-Sized Ultrathin-Film Dielectric, Process for Producing the Same and Nano-Sized Ultrathin Film Dielectric Device

摘要

A nano-sized ultrathin film dielectric composed mainly of either a single nanosheet of titanium oxide obtained by exfoliating layer titanium oxide or a laminate thereof. Thus, there can be accomplished low-temperature production of a dielectric device that simultaneously realizes high dielectric constant and excellent insulating performance in nanoregions and reduces influences of substrate interface deterioration and nonstoichiometry.