X-ray photoelectron spectroscopy analysis system for surface analysis and method therefor

摘要

An X-ray photoelectron spectroscopy analysis system for analysing an insulating sample 20, and a method of XPS analysis. The system comprises an X-ray generating means 30 having an exit opening 32 and being arranged to generate primary X-rays 46,56 which pass out of the exit opening in a sample direction towards a sample surface 22 for irradiation thereof. It has been found that the X-ray generating means in use additionally generates unwanted electrons 258 which may pass out of the exit opening substantially in the sample direction and cause undesirable sample charging effects. The system further comprises an electron deflection field generating means 380,480,580 arranged to generate a deflection field upstream of the sample surface. The deflection field is configured to deflect the unwanted electrons away from the sample direction, such that the unwanted electrons are prevented from reaching the sample surface.