No-contact alignment apparatus and no-contact alignment method

摘要

An exemplary alignment apparatus (2) includes a light source (50) for emitting light (501), a polarized light generator (51) for receiving the light and generating polarized light (504), a polarized light separator (52) for receiving the polarized light and separating the polarized light into a reflection polarized light beam (521) and a transmission polarized light beam (522) having capability to interfere with each other, a light reflector for changing transmission directions of the reflection and transmission polarized light beams to make the reflection and transmission polarized light beams parallel to each other, and a convergent lens (53) for making the reflection and transmission polarized light beams converge and interferingly irradiate a photosensitive polymer layer (30) to obtain an alignment layer (60). Unlike with conventional alignment apparatuses, because the alignment apparatus is no-rubbing, no-contact alignment apparatuses, debris and electrostatic charge are avoided or even eliminated.