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Method and apparatus for Manufacturing Optical Lithographic polymeric structures in Submicrometer and Micrometer scale and structure of obtained Polymer

机译:用于制造亚微米和微米级光学光刻聚合物结构的方法和装置以及所得聚合物的结构

摘要

Source through a simple and easy-to-use Factory polymeric structures with Dimensions below the Wavelength below the diffraction limit.Introduces a Photoinitiator in Resin deposited on a substrate which is mainly concentrated on the Photoinitiator and Radiates laser radiation with a Wavelength that is absorbed by the Molecules of the Photoinitiator, so that excitu00e1ndolas polymerize molecules C Ercanas resin.While the Radiation is Polymerized and form Islands Grow percolan Polymerized to form a continuous structure, shutting down the Radiation to reach the desired size.
机译:通过简单易用的工厂聚合结构来获得光源,该结构的尺寸低于波长低于衍射极限的波长。将一种光引发剂引入到沉积在基材上的树脂中,该光引发剂主要集中在光引发剂上,并辐射具有被吸收的波长的激光辐射使光引发剂的分子聚合,从而使激元聚合C Ercanas树脂分子。辐射被聚合并形成岛长大可可蓝则被聚合形成连续结构,从而关闭辐射以达到所需的尺寸。

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