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Method and apparatus for Manufacturing Optical Lithographic polymeric structures in Submicrometer and Micrometer scale and structure of obtained Polymer
Method and apparatus for Manufacturing Optical Lithographic polymeric structures in Submicrometer and Micrometer scale and structure of obtained Polymer
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机译:用于制造亚微米和微米级光学光刻聚合物结构的方法和装置以及所得聚合物的结构
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摘要
Source through a simple and easy-to-use Factory polymeric structures with Dimensions below the Wavelength below the diffraction limit.Introduces a Photoinitiator in Resin deposited on a substrate which is mainly concentrated on the Photoinitiator and Radiates laser radiation with a Wavelength that is absorbed by the Molecules of the Photoinitiator, so that excitu00e1ndolas polymerize molecules C Ercanas resin.While the Radiation is Polymerized and form Islands Grow percolan Polymerized to form a continuous structure, shutting down the Radiation to reach the desired size.
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