Integrated temperature sensor, and methods of fabricating a biochip integrated temperature sensor and generates a temperature signal

摘要

Integrated temperature sensor, bjochip and methods of manufacturing a temperature sensor integrated and to generate a signal of temperature. A biochip has a temperature sensor comprising an integrated micro mechanical actuator (20) having a deformation subject to temperature and a detector (30) intended to produce a signal according to a deformation of the actuator.The actuator may be formed of elastomeric material LC in a network. The detector (30) can be optical, magnetic or capacitive. The actuator may be provided as a layer and the deformation be a encrespamento layer.