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METHODS AND SYSTEMS FOR PRODUCING SILICON, E.G., POLYSILICON, INCLUDING RECYCLING BYPRODUCTS
METHODS AND SYSTEMS FOR PRODUCING SILICON, E.G., POLYSILICON, INCLUDING RECYCLING BYPRODUCTS
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机译:用于生产硅(例如多晶硅)的方法和系统,包括回收副产物
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摘要
Systems and processes are provided for efficient, cost-effective production of silicon by chemical vapor deposition. Reaction byproducts are recycled for use within the systems and processes without recovery and external processing of the byproducts. The systems and processes provide savings in both capital and operating costs.
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