ANTENNA OF APPARATUS FOR GENERATING INDUCTIVELY COUPLED PLASMA AND APPARATUS FOR GENERATING INDUCTIVELY COUPLED PLASMA HAVING THE SAME

摘要

PURPOSE: An antenna of an induced coupled plasma generating apparatus and the induced coupled plasma generating apparatus are provided to reduce total impedance by connecting a connection antennal unit and an external antennal unit in parallel with an internal antenna unit. CONSTITUTION: An internal antennal unit(110) includes a plurality of internal antennas(112, 113). An external antenna unit(120) is formed on the external side of the internal antenna unit. The external antenna unit includes a plurality of external antennas(121 to 123). The internal antenna unit is in parallel with the external antenna unit. The internal antenna and the external antenna are formed into a spiral shape.