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Optical nanometer scale gap sensing device based on Surface Plasmon Resonance and optical nanometer scale gap sensing method using the same
Optical nanometer scale gap sensing device based on Surface Plasmon Resonance and optical nanometer scale gap sensing method using the same
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机译:基于表面等离子体共振的光学纳米尺度间隙感测装置及使用该光学纳米尺度间隙感测方法
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摘要
The present invention is a nanoscale gap using surface plasmon resonance measurement device and a measurement method using the nanoscale gap between them relates to a prism (10); Transmittance of light is configured as a relatively good material to be deposited on the prism 10 in the first metal thin film 20; And the imaged object 50 and 0nm or more and spaced by a gap corresponding to several tens of nm or less, chemical stability than that of the first metal film 20 is composed of a relatively fine material of the first metal thin film 20, and depositing the first metal film 20 and the second metal film to form a metal layer having a thickness of less than 30nm 60nm with (30) is configured to include, in particular the light irradiation angle of the prism 10 the transmission of the first metal thin film 20 and to measure the gap between the second object according to the state of the imaging surface is irradiated with electromagnetic wave generated in the metal thin film 30 (50) and the second metal thin film 30 by a technical aspect, in the practical application as a surface plasmon resonance as the zoom imaging technique, the surface shape of the object on the imaging unit of nm to tens of nm nanoscale precision and a gap measuring device using the same, using the surface plasmon resonance imaging which enables It relates to a method for measuring nano-scale gap.
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