INTERFEROMETER FOR MEASURING PLASMA DENSITY USING A GAUSSIAN BEAM ANTENNA, CAPABLE OF EASILY CONTROLLING THE FOCUS OF MICROWAVE

摘要

PURPOSE: An interferometer for measuring plasma density using a Gaussian beam antenna is provided to reduce noise and beam loss because a vacuum window is not required.;CONSTITUTION: An interferometer for measuring plasma density using a Gaussian beam antenna comprises a microwave generator(100), wave guides(600), antennas(500), reflective mirrors(310), beam lenses(200), and a processing unit(110). The microwave generator generates microwave. The wave guides transfer the microwave to the antenna. The antenna emits the transferred microwave. The reflective mirrors reflect the emitted microwave. The beam lenses are integrally fixed to vacuum flanges(710) of a vacuum container(700) and transfer the microwave to the inside the vacuum container. The processing unit detects a phase difference of the microwave passing through plasma.;COPYRIGHT KIPO 2011