INFRARED DETECTION SENSOR AND A MANUFACTURING METHOD THEREOF, CAPABLE OF INCREASING AN INFRARED ABSORBING RATE

摘要

PURPOSE: An infrared detection sensor and a manufacturing method thereof are provided to improve a thermal insulation property of a sensor structure by a narrow support arm with low conductivity, thereby increasing sensitivity of the infrared detection sensor.;CONSTITUTION: A metal pad(220a) and a reflective film(220b) are formed on a substrate. A sensor structure(200a) is separated from the reflective film. The sensor structure comprises a sensing film(260), a lower protective film(240), and an upper protective film(270). An anchor(200b) has a fixed thickness on the metal pad. A support arm(200c) is expanded from the anchor to support the sensor structure.;COPYRIGHT KIPO 2011