METHOD OF FABRICATING A STAMPER FOR INJECTION MOLDING, PARTICULARLY FOR PREVENTING THE OCCURRENCE OF CURSOR SCRATCHES BY FORMING FINE PATTERNS AFTER FABRICATING A METALLIC STAMPER

摘要

PURPOSE: A method of fabricating a stamper for injection molding is provided to enhance the strength of a surface of a stamper by forming fine patterns to prevent the occurrence of scratches.;CONSTITUTION: A method for forming fine patterns to prevent the occurrence of scratches comprises the steps of: applying a photoresist(20) on a substrate(10); soft-baking the applied photoregist; placing a pattern mask(30) on the photoresist and exposing the pattern mask to the light; developing the exposed photoresist; and forming pattern(20') on a position where the photoresist is partially removed through a hard baking operation.;COPYRIGHT KIPO 2011