SUBSTRATE CHUCK, A SUBSTRATE ATTACHING APPARATUS COMPRISING THE SAME, AND A SUBSTRATE DETACHING METHOD USING THE SAME

摘要

PURPOSE: A substrate chuck, a substrate attaching apparatus comprising the same, and a substrate detaching method using the same are provided to offer the uniform peeling by forming the expansion space of wider area by comprising a plurality of holes in one expansion space.;CONSTITUTION: A frame comprises an inside diameter part(231) and an outer diameter part(233). A cohesive part(234) supports the substrate as being prepared on the surface of the frame opposed to the substrate. An elastic film(232) is located on the surface of the frame which is opposite to the substrate. The elastic film comprises a central part(232a) and a peripheral part(232b).;COPYRIGHT KIPO 2011