7-AXIS MANIPULATOR AND SAMPLE-HOLDER MOVING METHOD USING THE 7-AXIS MANIPULATOR, CAPABLE OF ACCURATELY MOVING A SPECIMEN TO A DESIRED POSITION BY CONTROLLING FIRST TO SEVENTH DRIVING UNITS USING FIRST TO THIRD CONTROL UNITS

摘要

PURPOSE: A 7-axis manipulator and a sample-holder moving method using the 7-axis manipulator are provided to precisely move the sample holder by linearly moving or rotating the sample holder on different directions and different axes by seven driving units. ;CONSTITUTION: A 7-axis manipulator comprises first to seventh driving units, a base unit(510), first and second stages(520,650) and a sample holder(640). The first driving unit linearly reciprocates a connecting member(130) on a first axis(110) of a lead screw(120). The second driving unit rotates a central axis member(210). The third and fourth driving units linearly reciprocates first and second moving members(320,420) on second and third axes(310,410), respectively. The base unit is coupled to the second moving member. Saw teeth is formed on the outer surface of the first stage and a fixed member is formed on the inner surface of the first stage.;COPYRIGHT KIPO 2011