MEASURING SYSTEM USING SPATIAL SPLITTING OF LIGHT, CAPABLE OF QUICKLY OBTAINING IMAGE INFORMATION OF A SAMPLE BY EFFICIENTLY EXPANDING A WIDE AREA OF A SAMPLE BY SPATIALLY SPLITTING LIGHT

摘要

PURPOSE: A measuring system using spatial splitting of light is provided to quickly obtain image information of a sample by efficiently expanding a wide area of a sample by spatially splitting light by increasing the number of optical paths or expanding an optical path for light generated from a light source. ;CONSTITUTION: A measuring system using spatial splitting of light comprises a light source(10), a light dividing unit(11), an interference unit(13) and a sensor. The light source emits light, of which central wavelength periodically changes. The light dividing unit divides single path of light emitted from the light source into different paths of light. The interference unit is arranged as many as the number of paths of dispersed light. The interference unit outputs light emitted from the light dividing unit as a plurality of lights generating an interference signal. The sensor receives lights generating the interference signal. The sensor gets image information of a sample.;COPYRIGHT KIPO 2011