MLA CONTAING FIDUCIAL MARK AND MASKLESS EXPOSURE APPARATUS WITH AFOREMENTIONED MLA AND CALIBRATING METHOD THEREOF

摘要

PURPOSE: A micro-lens array including a reference mark and an exposure apparatus without a mask and a correcting method of the same are provided to easily measure and correct the axis twisting of the micro-lens array(MLA) and a digital micro device(DMD) of an exposure apparatus without a mask using the MLA including a reference mark. CONSTITUTION: A reference mark(20a) is formed instead of a micro-lens in a part of a micro-lens array(20) corresponding to a pixel of a space optical modulator device. A deformed beam in the space optical modulator device of an exposure apparatus without a mask is passing through the micro-lens array. The space optical modulator device deforms a generated beam from a light source into a desired pattern. A plurality of micro-lens compresses the deformed beam in the space optical modulator device.