METHOD FOR CONTROLLING FLOW RATE, METHOD OF FLOW RATE CONTROL CORRECTION, FLOW RATE CONTROL DEVICE, AND COMPUTER-READABLE STORAGE MEDIUM

摘要

products (mass flow controller) after shipment, a plurality of types of room ( ) using a plurality of gas flow ( ) specification by mass flow controller for the range ( ) allows the change. In the initial state of the mass flow control unit, proofreading ( ) to obtain a calibration gas characteristic data, and measuring the flow rate of the flow rate setting signal thread using a gas, a calibration gas is stored in a characteristic data control means. On the other hand, to obtain a plurality of types of characteristic data measuring chamber gas flow the chamber to the flow rate setting signal each gas chamber, gas chamber and stores the characteristic data in the storage medium. Then, before the movable mass flow rate control apparatus, reads out the characteristic data from the gas chamber via the gas chamber using a computer from the storage medium output ( ; read out), and also stored in the calibration gas properties and the control means and outputs the read data. And, converting the data into the calibration chamber gas properties characteristic data to control gas flow rate based on the correction, and writes the correction data to control the flow rate control means; and ( write). The flow rate compensation control chamber gas flow rate is corrected on the basis of the data.