Preparation Method of Patterned Gold Nanoparticle Films using Electron Irradiation and Post-pyrolysis, the Gold Nanoparticle Films prepared by the same and the biochemical sensor including the Gold Nanoparticle Films

摘要

The present invention electron beam irradiation and gold nanoparticle film was patterned using pyrolysis method, whereby manufacturing The gold nanoparticle film and relates to a biochemical sensor comprising the gold nanoparticle film, and more particularly, to create a patterned by selectively irradiating an electron beam on a gold precursor film gold precursor film, the patterned via thermal decomposition Method for preparing a conversion to a patterned gold nanoparticle film a gold precursor film to the gold nanoparticles, whereby the prepared gold nanoparticle film and to a biochemical sensor comprising the gold nanoparticle film. ; the patterned gold precursor film in a large area through the selective electron beam irradiation according to the present invention can efficiently produce, can be a highly pure gold precursor film patterned through the thermal decomposition and produce a large area at a high speed. In addition, the gold nanoparticle film according to the invention is electrical and optical properties is very good, so, there is a sensitivity that can detect a small amount of biological material can be used as an excellent biochemical sensor, as well as proteins, such as certain biological functional groups Recognized biochips (biochip) can be useful even.