Micromechanical component for use as acceleration sensor in motor vehicle i.e. automobile, has electrode elements for providing parasitic capacitance to contrary cause capacitance change between electrodes and compensator structures

摘要

The component (100) has compensator structures (140) serving as a counter electrode and comprising mass elements (147) arranged on a supporting element (143). The mass elements produce a mass asymmetry in relation to a rotary point (D). The compensator structures comprise electrode elements (145) that are arranged on the supporting element for providing parasitic capacitance or auxiliary capacitance to contrary cause capacitance change between electrodes (131, 132) and the compensator structures due to transverse acceleration that acts on the component.