Wet chemical structuring of superconducting, ferromagnetic and/or ferroelectric oxides, comprises partially covering oxide surface of superconducting, ferromagnetic and ferroelectric oxide with a mask and contacting with etching solution

摘要

Wet chemical structuring of superconducting, ferromagnetic and/or ferroelectric oxides, comprises partially covering an oxide surface of superconducting, ferromagnetic and/or ferroelectric oxides with a mask and contacting with an etching solution at a pH of 0-2 and at 20-100[deg] C.