Device for generating and measuring a liquid jet, comprises a liquid source, which provides a liquid at a certain output pressure, a focusing device for forming and delivering the liquid jet along a beam axis, and a beam measuring device

摘要

The device for generating and measuring a liquid jet (22), comprises a liquid source (31), which provides a liquid at a certain output pressure, a focusing device (36) for forming and delivering the liquid jet along a beam axis, a beam measuring device positioned or positionable in an axial distance from the focusing device, where the beam measuring device is designed to capture the liquid jet with respect to its geometry and its progression with respect to a reference axis, and a first pair of a first light source (40) and a first light receiver. The device for generating and measuring a liquid jet (22), comprises a liquid source (31), which provides a liquid at a certain output pressure, a focusing device (36) for forming and delivering the liquid jet along a beam axis, a beam measuring device positioned or positionable in an axial distance from the focusing device, where the beam measuring device is designed to capture the liquid jet with respect to its geometry and its progression with respect to a reference axis, a first pair of a first light source (40) and a first light receiver, where the first light source emits a first light beam (41) or a first light beam bundle along a first measuring axis transverse to a beam longitudinal axis, and a second pair of a first light source and a first light receiver. The first light beam or the first light beam bundle crosses the liquid jet, where the first light receiver of the first light source is arranged opposite to the first measuring axis and is designed to capture the first light beam or the first light beam bundle after which the first light source or the first light beam bundle passes the liquid jet. The pair of the first light source and first light receiver is translationally and/or rotationally displaced relative to the liquid jet. The second light source emits a second light beam or a second light beam bundle along a second measuring axis transverse to the beam longitudinal axis. The second light beam or the second light beam bundle crosses the liquid jet, where the second light receiver of the second light source is arranged opposite to the second measuring axis and is designed to capture the second light beam or the second light beam bundle after which the second light source or the second light beam bundle passes the liquid jet. The second measuring axis deviates from the first measuring axis. The first and the second measuring axes geometrically cross in the region of the liquid jet, run to each other in a crooked manner, have their minimum distance in the space in the region of the liquid jet, and run orthogonal to the beam longitudinal axis or the reference axis. The first- and/or the second light receiver are a charge-coupled device camera, where the associated first- and/or second light source emit light detectable by the camera. The first- and/or second light source comprises a light-emitting diode, and is a laser light source. The first- and/or the second light receiver are a laser light sensor. The laser light source is aligned to a mirror arrangement, which deflects the emerging laser light to the light receiver through the liquid jet. The mirror arrangement is a rotating or rotationally drivable polygonal mirror arrangement. An optical unit is arranged to the light source and/or the light receiver. The focusing device comprises a nozzle, and is formed with a coupling device for coupling the laser beam in the liquid jet. Independent claims are included for: (1) a method for generating and measuring a liquid jet; and (2) a processing device for processing a workpiece.