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Brief description of the excitation of a mobile element of a microstructure
Brief description of the excitation of a mobile element of a microstructure
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机译:微观结构中可移动元素的激发的简要描述
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摘要
The present invention relates to a process for the excitation of a resonant element (14) of a microstructure, this element being movable along a degree of freedom. The method comprises a step of application of a beam of charged particles (51) on said microstructure, the beam being configured so as to cause the element according to a reciprocating movement according to its degree of freedom.
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