Three-dimensional contactless nanotopography method for measurement of altitude of nanostructured object in e.g. micro-optical field by interferometric altitude sensor, involves fixing reference surface and inspected object with each other

摘要

The method involves measuring thickness of air between a reference surface (11) of a fizeau type measuring cavity (10) and an inspected object (12) using a thickness measuring sensor (20). The reference surface and the inspected object are fixed with each other or fixed to a common support (13). Light streams are transmitted between optical blocks of an altitude measuring apparatus using a light beam combination or separation device. Independent claims are also included for the following: (1) an altitude measuring apparatus comprising an informatic and electronic unit for digitizing, treating, recording and visualizing a signal (2) an interferometric altitude sensor comprising a measuring head arranged corresponding to an interferometric object.