Methods to make fine patterns by exploiting difference of threshold laser fluence of materials and TFT fabrication methods using the same

公开/公告号GB2466083B

专利类型

公开/公告日2011-08-17

原文格式PDF

申请/专利号GB20090006956

申请日2009-04-23

分类号H01L51/00;H01L21/336;H01L51/05;

国家 GB

入库时间 2022-08-21 17:45:10