SMALL ULTRA-HIGH NUMERICAL APERTURE CATADIOPTRIC OBJECTIVE SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an objective system and an imaging method capable of imaging a specimen in a wide spectrum area.;SOLUTION: The ultra-high numerical aperture objective system for imaging specimens comprises: a focusing lens element group 101 that includes one or a plurality of lens elements, focuses incident light and generates an intermediate image; a field lens element group 102 including one or a plurality of field lens elements 112 disposed near the intermediate image; and a catadioptric element group 103 disposed between the field lens element group and the specimen, receiving light from the intermediate image and providing emission light. The catadioptric element group includes: one or a plurality of Mangin elements 115 having a spherical reflection surface and a reflection surface showing no significant warpage; and a meniscus lens element 114. The meniscus lens element is disposed not to come into direct contact with each Mangin element and to have a meniscus surface having a meniscus surface curvature radius substantially inverse to the spherical curvature radius of the spherical reflection surface.;COPYRIGHT: (C)2013,JPO&INPIT