METHOD FOR COATING PIPE WITH DLC FILM, PIPE COATED WITH DLC FILM, AND DLC FILM COATING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method for coating a pipe with a DLC film (diamond-like carbon film) by using a PSII method (plasma source ion injection method) in relation to a DLC film provided on the outer circumferential surface of a pipe having insulating property to inhibit the permeation of moisture; to provide a coated pipe obtained by using the method; and to provide a DLC film coating apparatus for performing the method.;SOLUTION: A pipe 2 having insulating property is arranged at the inside of a vacuum vessel 3 in such a state that an electrode 6 is inserted in the hollow part of the pipe 2, then a hydrocarbon gas is filled in the vacuum vessel 3 in a reduced pressure state, and a plasma generation voltage of a negative low voltage for generating a plasma is applied to the electrode. Thereafter, an ion acceleration voltage is applied to the electrode to coat the outer circumferential surface of the pipe having insulating property with the DLC film.;COPYRIGHT: (C)2013,JPO&INPIT