HOLDER FOR ELECTRIC DETECTION ELECTRONIC SPIN RESONANCE APPARATUS AND ELECTRIC DETECTION ELECTRONIC SPIN RESONANCE APPARATUS

摘要

PROBLEM TO BE SOLVED: To highly reliably evaluate the density and the origin of a defect in an insulation film or in a semiconductor film by surely securing an electrical contact for electric detection electronic spin resonance measurement and remarkably reducing noise caused by contact resistance or the like.;SOLUTION: A sample holder for electric detection electronic spin resonance is provided which includes, in order to solve steam problems, a pair of electrodes disposed on a measurement sample, a pair of wires connected to a pair of tungsten needles in contact with the electrodes, a bolt for mounting the wires to the sample holder via a spring washer and a nut, a partition formed around the measurement sample, a setscrew inserted into the partition, and a leaf spring disposed between the partition and the measurement sample.;COPYRIGHT: (C)2012,JPO&INPIT