DECISION PROGRAM OF EFFECTIVE LIGHT SOURCE, EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, AND DECISION PROGRAM OF INTENSITY TRANSMITTANCE DISTRIBUTION OF FREQUENCY FILTER

摘要

PROBLEM TO BE SOLVED: To efficiently decide a value for a plurality of target functions.;SOLUTION: A light intensity distribution which is to be formed on a pupil surface is decided based on a first target function that has a linear relationship with the light intensity in a plurality of regions available by dividing the pupil surface of an illumination optical system, and a second target function which does not have a linear relationship with the light intensity in the regions of pupil surface. The decision program includes a step in which the light intensity on an image plane is calculated for each region of the pupil surface in an assumed case where the value of light intensity in one region among a plurality of regions of the pupil surface is a unit value while the value of light intensity in all other regions is zero, a second step in which the value of first target function and the value of second target function are calculated for each region by using the calculated light intensity, a third step in which the value of light intensity in such region as the value of second target function is less than a threshold value is set to be a predetermined constant value regardless of magnitude of the value of first target function, and a fourth step in which the value of light intensity in such region as the value of second target function is the threshold value or larger is set according to the magnitude of the value of first target function.;COPYRIGHT: (C)2012,JPO&INPIT