ZINC OXIDE TRANSPARENT CONDUCTIVE FILM, SINTERED COMPACT TARGET FOR MAGNETRON SPUTTERING, LIQUID CRYSTAL DISPLAY AND TOUCH PANEL, AND EQUIPMENT COMPRISING THE ZINC OXIDE TRANSPARENT CONDUCTIVE FILM

摘要

PROBLEM TO BE SOLVED: To provide: a transparent conductive film using zinc oxide as a base material, which has low resistivity and in which film thickness dependence of resistivity and a resistivity distribution on a substrate are reduced; a technique for producing the same; and an oxide sintered compact for producing a thin film.;SOLUTION: The zinc oxide transparent conductive film in some embodiment is substantially composed of zinc, gallium, tin and oxygen, and in which the gallium is comprised in the proportion of 1 to 8% in the atomic ratio of Ga/(Zn+Ga+Sn) and also the tin is comprised in the proportion of 0.1 to 1% in the atomic ratio of Sn/(Zn+Ga+Sn).;COPYRIGHT: (C)2012,JPO&INPIT