METHOD FOR MANUFACTURING ZINC OXIDE-BASED TRANSPARENT CONDUCTIVE FILM-FORMING MATERIAL, TARGET USING THE TRANSPARENT CONDUCTIVE FILM-FORMING MATERIAL, AND METHOD FOR FORMING ZINC OXIDE-BASED TRANSPARENT CONDUCTIVE FILM

摘要

PROBLEM TO BE SOLVED: To provide a titanium (low valence)-doped zinc oxide-based transparent conductive film-forming material enabling film formation of the transparent conductive film having excellent conductivity and being suppressed in abnormal discharge at film formation.;SOLUTION: The method for manufacturing the zinc oxide-based transparent conductive film-forming material uses a raw material powder containing a mixed powder of a low-valence titanium oxide powder and a zinc oxide powder or a zinc hydroxide powder, or a zinc titanate compound powder, and having a proportion of the number of titanium atoms to the total number of metal atoms of 2% and ≤10%, and includes discharge plasma sintering in vacuum or in an inert atmosphere at ≥700°C and ≤1,200°C.;COPYRIGHT: (C)2012,JPO&INPIT