Plasma central processing unit and plasma constancy decision mannered

摘要

PROBLEM TO BE SOLVED: To accurately detect the degree of plasma flickering to accurately determine the plasma stability based on the detection result.;SOLUTION: The plasma processing equipment includes: a vacuum processing chamber 2; a lower electrode 3 for placing and holding a substrate to be processed within the vacuum processing chamber; a gas supply means 4 for supplying processing gas to the vacuum processing chamber; a plasma generation means 5 for generating plasma by supplying high-frequency energy to the processing gas supplied into the vacuum processing chamber; an observation port 14 for observing the generated plasma; an imaging device 15 for imaging the plasma via the observation port; and an analyzer 16 for analyzing the video data imaged by the imaging device, wherein the analyzer analyzes the video data to determine the degree of plasma flickering.;COPYRIGHT: (C)2009,JPO&INPIT