inspection device of a figure, inspection method of overlapping shapes and charged particle beam drawing apparatus and overlap

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for inspecting overlapping figures capable of determining an arrangement in any hierarchy region of any chip of the overlapping figures.;SOLUTION: The apparatus (a control unit 110) for the figures includes: a chip overlap inspection unit 114 configured to input a data file on each chip of a plurality of chips arranged in a writing pattern, and inspect an existence of an overlap between a plurality of chips, based on arrangement data on each region of the plurality of chips; a setting unit 64 configured to set, with respect to a plurality of hierarchies and a plurality of cell regions of each of the plurality of hierarchies; an extraction unit 66 configured to extract, with respect to a plurality of chips where the overlap occurs, a cell region where the overlap is located, from a higher hierarchy level to a lower hierarchy level in order; a figure overlap determining unit 72 configured to determine an existence of an overlap between a figure in the cell region extracted and a figure in the other cell region extracted; and an error-information output unit 76 configured to output data on a plurality of figures overlapping. The overlapping figures can be detected while determining the hierarchies and the cell regions.;COPYRIGHT: (C)2009,JPO&INPIT