Process manner of the artificial crystal and jig null for artificial crystal processing

摘要

PROBLEM TO BE SOLVED: To provide a processing method of an artificial quartz crystal, capable of determining an accurate cutting angle when cutting the artificial quartz crystal into the form of a wafer, the artificial quartz crystal manufactured through the method, and an artificial quartz crystal processing jig intended for use in the method.;SOLUTION: The processing method of the artificial quartz crystal comprises the steps of: polishing a Z plane of a surface of the artificial quartz crystal 3 so that it becomes a reference plane; fixing the artificial quartz crystal 3 using the jig so that the polished Z plane follows an inclined surface of the jig; and polishing an upper plane of the artificial quartz crystal so that it becomes a horizontal plane. Here, a surface of the jig which supports the Z plane is inclined at a certain angle so that an r plane 4 becomes a horizontal plane facing upward, provided that the r plane 4 is formed at a Y-direction end (i.e. a length-direction end) of the artificial quartz crystal 3.;COPYRIGHT: (C)2009,JPO&INPIT