Manner null in order to produce the configuration element and this kind of configuration element of the micro machining die which has the diaphragm

摘要

PROBLEM TO BE SOLVED: To effectively prevent intrusion of contaminated particles into a cavity.;SOLUTION: At least one inlet passage 8 to the cavity 10 is formed between an upper layer 6 of a layer system in a region of a diaphragm 9, and a lower layer 2 disposed directly above a first sacrificial layer 1. At least one aperture 7 is provided in the upper layer 6, and at least one aperture 3 is provided in the lower layer 2. The aperture 7 provided in the upper layer 6, and the aperture 3 provided in the lower layer 2 are arranged shifted from each other.;COPYRIGHT: (C)2005,JPO&NCIPI