Abatement methods and abatement system of perfluorocarbon gas

摘要

PROBLEM TO BE SOLVED: To provide a detoxifying method and detoxifying device which enable a decomposition and removal of a PFC component at a high removal rate at low temperatures wherever possible (in a low-consumption heat energy).;SOLUTION: In a state that the atmosphere remains unoxidated (in other words, in the absence of free O₂) with an electric heater used as a heat source, a treating gas (particularly, treating gas containing an oxidized gas) is pyrolyzed by a hydrogen gas, or a mixture of the hydrogen gas and NH₃ gas in the presence of a water content. The method enables a treatment at the higher removal rate (preferably, of 98% or more) compared to the conventional methods by the heat decomposition and the NH₃ treatment.;COPYRIGHT: (C)2007,JPO&INPIT