Measurement and revision of the lens distortion in the multiplex spot scanning arrangement

摘要

This invention the object thing aspect (40) with the picture surface (42) the image formation system which it possesses (32) offers the method of deciding the distortion. As for particular method: By analyzing the graphics data, the image sensor (34) the photosensitive territory (44) picture optical spot above (46) the procedure which decides position (204); Way and, the aforementioned picture optical spot (46) to the auxiliary lattice (48) mapping it does the lattice point, being the procedure which the fitting it can point mapping function, the aforementioned auxiliary lattice (48) probe optical spot (6) the burabe lattice (8) with the procedure which the similarity is done geometrically; It possesses. In addition as for this invention, the object thing aspect (40) with the picture surface (42) the image formation system which it possesses (32) also image pickup method of the sample which is used is offered. As for particular method: The image sensor (34) the photosensitive territory (44) the procedure which decides the read-out point above (304) being by applying mapping function vis-a-vis the lattice point of the auxiliary lattice, probe optical spot (6) the burabe lattice (8) with the similarity it does the aforementioned auxiliary lattice geometrically, procedure; And, the aforementioned photosensitive territory (44) the procedure which grasps the graphics data from the read-out point above (305) it possesses. In addition, the measurement system which decides the distortion of image formation type (10) and the multiplex spot optical scanner (10) it is disclosed.