JIG FOR CALIBRATION, CALIBRATION METHOD AND SHAPE MEASURING DEVICE THAT CAN MOUNT THE JIG FOR CALIBRATION

摘要

PROBLEM TO BE SOLVED: To provide a jig for calibration and a calibration method that allow simple and highly accurate calibration of a shape measuring device capable of measuring eccentricities of lenses, and a shape measuring device that can mount the jig for calibration.;SOLUTION: A jig for calibration 100 is provided with three reference balls 2 that can be so installed that the centers of the balls divide the circumference of circle into three equal parts and keep reference balls for measuring in contact with each other. A shape measuring device, that can mount the jig for calibration, has a first probe for acquiring information on the shape of an object of measurement, a second probe disposed on the opposite side to the first probe relative to the jig for calibration for acquiring information on the shape of the object of measurement, a measuring unit that measures with the first probe and the second probe the arranged reference balls for measuring and figures out a first measured result and a second measured result, and a shift quantity calculating unit that compares the first measured result and the second measured result and calculates the shift quantity. A calibration method comprise a measuring step using the shape measuring device and a shift quantity calculating step for calculating the shift quantity and other factors.;COPYRIGHT: (C)2012,JPO&INPIT