Measurement manner of the flare tonnage, the photosensitive material is applied to the mask for flare quantitative measurement

摘要

PROBLEM TO BE SOLVED: To measure a flare amount with ease and accuracy.;SOLUTION: A photosensitive material 3 is applied on a substrate 1, and a part of the photosensitive material 3 is exposed so that the thickness of the photosensitive material 3 may partially be changed by using a mask provided with a transparent part which does not have a pattern. The amount of flare is measured based on the distribution of remaining film volume of the photosensitive material 3 in the region corresponding to the transparent part of the mask, and in the region other than the above region.;COPYRIGHT: (C)2007,JPO&INPIT