Alignment method of the connection terminals in the TCP handling equipment and TCP handling equipment

摘要

With 2nd camera 6b, photographing the test pad P of suffering test, TCP as you acquire the coordinate data of particular test pad P, photographing the probe 81 of probe card, 8 you acquire the coordinate data of particular probe, 81 from the coordinate data of test pad P and the coordinate data of probe 81, calculate the position gap quantity of test pad P and probe, 81 you make probe card move 8 due to probe card stage 7 on the basis of the particular position gap quantity, you do the alignment of the probe 81 for the test pad P of suffering test TCP automatically. Because of this, accurately and easily to do it is possible the alignment of the test pad P of TCP and probe 81 of probe card 8.