Being the Pirani vacuum gauge which has the Pirani

摘要

PROBLEM TO BE SOLVED: To provide a Pirani vacuum gage capable of expanding a measurable pressure range and improving measurement accuracy.;SOLUTION: The Pirani vacuum gage comprises: a float membrane 32 having an electric resistor 40 which is disposed on its surface, and being formed so as to straddle a through-hole 24 of a substrate; a peripheral membrane 36 being formed on the surface of the substrate so as to surround the float membrane 32; and a pair of connecting membranes 34 which are arranged symmetrically so as to sandwich the center of the float membrane and connect the circumference of the float membrane 32 to the peripheral membrane 36. The Pirani vacuum gage is characterized in that both ends of the electric resistor 40 are pulled out through the surface of the pair of first connecting membranes 34 to the surface of the peripheral membrane 36.;COPYRIGHT: (C)2008,JPO&INPIT