Electrical characteristics measurement circuit, delay library creating apparatus, how to create a delay library, and design method of a semiconductor integrated circuit

摘要

PROBLEM TO BE SOLVED: To provide a delay library creation method for more accurately dividing a variation in delay values into a random component, a shot dependence component and an in-plane tendency component of a systematic component.;SOLUTION: The delay library creation method is a method for creating a delay library in which delay values of circuit components of a logic circuit are stored. The method comprises (a) a step for calculating first delay data 48 depending upon the position of a semiconductor wafer in-plane, and second delay data including a random variation delay value that does not depend upon the position of the semiconductor wafer in-plane and an exposure dependence variation delay value caused by exposure processing by performing a wavelet analysis on the basis of first electrical characteristic data 44 on a semiconductor wafer of a circuit component, and (b) a step for separating the random variation delay value from the exposure dependence variation delay value and making the random variation delay value and the exposure dependence delay value to be third delay data and fourth delay data 46, respectively by performing a Fourier analysis on the basis of the second delay data.;COPYRIGHT: (C)2008,JPO&INPIT